Used LASERTECH 9MD82 #293754419 for sale
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ID: 293754419
Wafer Size: 8"
Automatic mask inspection system, 8"
Non-functional
NIKON 6025 Reticle case
Lens spacing: 25mm-179mm
Stage section:
Light source
CCD image sensor
Stage unit department
Table drive unit
Auto focus
Mask holder size:
Size 5", plate thickness 0.09" Single mask holder
Size 6", plate thickness 0.25" Single mask holder
Mask size tolerance:
5": 126.6±0.4mm
6": 52.0±0.4mm
9": 230.0±0.4mm
Mask types:
Chrome mask
PSM Mask
OPC Mask
No SMIF Interface
Power supply: 100 V, 50/60 Hz, 40A.
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