Used SHIMADZU CTO-10A VP #170893 for sale

SHIMADZU CTO-10A VP is an advanced thermal oxide equipment for cleanroom/lab processing environments. This multi-functional machine has features like automated thermal oxide processing, chemical-vapor deposition, and chemical-mechanical planarization. It performs the following operations: chemical-mechanical polishing (CMP), chemical vapor deposition (CVD), and chemical vapor catalytic oxidation (CVCO). These processes are used to produce high-performance components, particularly those used in microelectronics and optical devices. CTO-10A VP is equipped with a touch panel interface, allowing personnel to easily monitor the machine's performance. Furthermore, its control system is powerful yet flexible and can be custom-tailored to meet specific requirements. Its design and layout ensure optimal operation, as well as ease of operation and maintenance. SHIMADZU CTO-10A VP features advanced end points detection capabilities, allowing it to accurately detect the end points of the oxidation process without the need for additional time-consuming manual endpoint detection processes. The unit also includes an additional pre-oxidation method to ensure a stable oxidation temperature during the oxidation stage. To maintain consistent temperature levels, CTO-10A VP is equipped with a PID-controlled temperature control machine. The tool is compatible with a variety of gas sources, from air/argon to oxygen, nitrogen and CF4. The CTO-10A's advanced stainless steel showerhead supplies the exact same amount of mass-flow for each of the gases. Moreover, the asset offers a maximum temperature of 750°C, ensuring it can perform oxide process steps with high precision. In addition, SHIMADZU CTO-10A VP has a 6-area wafer aligner which operates in unison with the catalytic oxidation process. Moreover, the model has an Automatic Cassette Loading (ACL) process which makes it easier to set up CVM, CVD and CVP operations. CTO-10A VP's top-quality materials further help in creating a long-lasting, safe and environmentally friendly machine. This high-tech thermal oxide equipment is a powerful asset for any lab or high-tech processing environment.