Used CYMER 5300 #34281 for sale

CYMER 5300 is a rugged, reliable 5-axis laser equipment specifically designed for deep UV lithography applications. It features a high repetition-rate Deep Ultra-Violet (DUV) laser light source, with emission at 193 nm, a 6-channel optical centering system, precision-engineered capability, and compatibility with a variety of mask materials including quartz, quartz-free substrates, and pellicles. 5300 offers laser-based patterning capability to achieve high-resolution imaging and excellent image repeatability. For the high-precision printing technology, the unit is equipped with a pre-alignment stage and advanced, closed-loop beam-positioning controls. It also has a highly dynamic multi-axis beam-directing machine and high-speed scanning capabilities. The tool is designed with an automated alignment, exposure, and edge-erosion control asset to ensure accuracy, repeatability, and control of the patterning process. Additionally, CYMER 5300 incorporates an integrated metrology model to ensure process control and image quality. Furthermore, the equipment offers true dynamic beam deflection for consistent printing performance and the highest pattern fidelity, even at fiber level. The system uses a laser light source with a rated total power of over 20 Watts, consisting of a 5 kHz, pulse-width modulated, quenched Q-switched laser, and a beam delivery unit with inter-connecting optical optics. This source illuminates and governs the patterning process, offering a wide range of exposure angles, high throughput, large and small apertures, and integrated calibration functionality. 5300 also includes an intuitive, user-friendly user interface, with flexible operation settings and efficient interlock management. It combines precision mechanical performance with sophisticated digital control systems to provide reliable and repeatable electronics lithography results. It is an ideal choice for high-volume, high-precision IC production.