Used CYMER ELS 5300 #293797423 for sale

Manufacturer
CYMER
Model
ELS 5300
ID: 293797423
Laser.
CYMER ELS 5300 is a dynamic excimer laser that is widely used in the manufacture of semiconductor chips. This advanced equipment is composed of a computer-controlled, sealed-off laser chamber that provides high energy pulses of light. The chamber is pressure-stable and its interior environment is highly optimized for peak efficiency. At its core, CYMER ELS-5300 produces a 193-nanometer (nm) pulse of wavelength-stabilized laser light at up to 5.0 kilowatts (kW) of peak power. This is accomplished through a compound optical system involving two separate excimer laser heads, each of which is capable of independently producing up to 2.5kW. The optical unit is further enhanced by an advanced position sensing machine for improved transverse beam stability and a specially designed "power-stabilizing" tool for optimizing intensity stability over time. In addition to its powerful excimer laser setup, ELS 5300 features a high-precision stepper motor and a highly automated fan-in-duct asset. The stepper motor enables a fast, efficient exposure time while the fan-in-duct model provides superior cooling of the excimer laser heads. ELS-5300 can be accompanied by a wide range of optional accessories, including UV separator modules and high-throughput scanning systems. These accessories enable the equipment to be adjusted to meet the specific needs of different applications. Overall, CYMER ELS 5300 is a powerful, reliable, and well-engineered excimer laser system that is ideal for use in advanced semiconductor fabrication processes. Its user-friendly interface and wide range of optional accessories make it an adaptable and cost-effective choice.
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