Used CYMER ELS 5300 #9245310 for sale

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Manufacturer
CYMER
Model
ELS 5300
ID: 9245310
Laser system Used with CANON FPA 3000 EX5 Stepper.
CYMER ELS 5300 is a laser equipment designed for a wide range of semiconductor fabrication applications such as lithography, etching, annealing, and texturing. This robust system provides high quality, uniform processing capabilities with a flexible unit design and advanced software. It is equipped with a 5 kW Yb fiber laser, an ultra-stabilized, high transmission laser beam delivery machine and advanced scanning capabilities. The air-cooled Yb fiber laser produces output of 5 kW in a continuous, uniform, stable beam over long working distances. It offers high power performance with an extended operational life and low maintenance. The laser beam delivery tool provides precise scanning of the work area, utilizing advanced galvanometer and piezo-driven scanning technology for accurate placement of laser shots. The advanced digital control asset provides superior process performance by allowing easy access to user-defined recipes for various processing requirements. It also features intelligent auto-focus and power control for automatically setting the optimal processing conditions, eliminating calibration time and providing uniform, high-quality results. CYMER ELS-5300 is also equipped with an integrated vision model and process monitoring functions to ensure accuracy and safety while providing comprehensive process control. ELS 5300 laser equipment is a robust and versatile solution for the demanding needs of semiconductor fabrication. It offers superior performance, with consistent, high quality processes, high throughput, and high system reliability. The 5 kW output, uniform beam quality, advanced scanning capabilities, and intelligent auto-focus and control functions provide the perfect platform for a wide range of advanced lithography, etching, annealing, and texturing requirements.
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