Used CYMER ELS 5300 #9260804 for sale

CYMER ELS 5300 is a moderate to high-volume production laser for semiconductor processing. It utilizes next-generation resonator optics to provide a powerful and reliable laser source. CYMER ELS-5300 offers a variety of laser parameters, allowing for up to 5 kW of maximum output power and up to 8 kHz of pulse frequency, making it ideal for deep-UV lithography and high-volume processing applications. ELS 5300 incorporates a variety of advanced features, including an integrated optical fiber delivery equipment, advanced cooling chambers, and a reliable multi-axis motion system. This allows for precision control of the laser's spatial and temporal characteristics and synchronous laser pulsing. At the heart of ELS-5300 is its advanced resonator optics, comprised of a patented dual-stage design incorporating optimized mirrors and a high-quality vacuum chamber. This provides improved beam characteristics with decreased energy losses, enabling faster processing speeds and improved throughput. CYMER ELS 5300 is equipped with a novel gas-fill unit, designed to enable fast switching between gas types for application purposes, such as etching or selective deposition. This machine also allows for the introduction of optical aids, such as liquid crystal polarizers, to enable fine control over the beam's characteristics. The laser is designed to be integrated as part of a multi-stage production process, featuring a standard interface for connection to other semiconductor processing systems and equipment. This includes power supply and monitoring systems, as well as a software suite for recording and monitoring the quality of the laser output. Ultimately, CYMER ELS-5300 laser is an ideal choice for precise, high-volume semiconductor production. Its unique combination of features, such as its dual-axis resonator optics and gas-fill tool, enables rapid, reliable processing with an optimal balance of power and precision.