Used CYMER ELS 5400 #9145746 for sale

Manufacturer
CYMER
Model
ELS 5400
ID: 9145746
Vintage: 1997
Laser 1997 vintage.
CYMER ELS 5400 is a class 1 Excimer laser equipment by California-based laser manufacturer, Gooch & Housego. This laser is often used for deep ultraviolet photoresist processing, in addition to a variety of other applications such as packaging and marking. It features an ultrahigh-brightness 248-nm output and offers high repetition rates for high-throughput processing. CYMER ELS-5400 utilizes advanced technology such as a self-monitoring gas delivery system and built-in safety interlocks. ELS 5400's output is generated by a multi-frequency Excimer laser which pulses at up to 300Hz, resulting in a highly effective high-throughput unit. The laser can utilize a wide range of pulse lengths, ranging from 5μs to 10μs, allowing users to choose the best processing conditions for their needs. The laser can also be customized to have different performance levels, enabling users to optimize the machine for their applications. The laser also features a patented KTA-Directional Gas Delivery Tool, which helps to ensure reliable, accurate gas flow and works to match the gas rate to pulsing frequency. ELS-5400's user-friendly and ergonomic design makes it an ideal choice for many environments. It is designed for ease of setup and can be safely operated with very minimal effort. Its laser workstation is equipped with several safety features, including closed-loop and interlock control systems and a beam path monitoring asset, ensuring safe and effective operation at all times. Finally, CYMER ELS 5400 is capable of being upgraded with various options, such as a medium-pressure gas delivery model and a multi-frequency laser service equipment, as well as with custom adaptations to meet specific user requirements. This flexibility makes the system an ideal choice for a wide range of industrial and research applications.
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