Used CYMER ELS 5400 #9188511 for sale

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Manufacturer
CYMER
Model
ELS 5400
ID: 9188511
Vintage: 1997
KrF Scanner laser EX12 EX14 1997 vintage.
CYMER ELS 5400 is a state-of-the-art excimer laser equipment designed for a range of industrial and research applications. It combines superior laser source technologies with precise control systems, enabling it to produce optimal illumination for the most precise applications. This laser is renowned for its high-power, robust design, and broad range of wavelengths, making it an ideal tool for manufacturing processes such as thin film deposition, photolithography, and micromachining. It is capable of operating at an average power of 400 watts, with nominal output wavelengths extending from 248 to 308 nanometers. CYMER ELS-5400 features an integrated three-axis motorized scanner which provides precise, high-speed scanning capabilities, along with highly precise beam scanning and positioning. This allows for precise imaging and the adjustable collimating optics facilitates the adjustment of the shape, size, and position of output beam spots. The patented high pulse mode reduces pulse-to-pulse jitter and offers high accuracy when performing alignments. This ensures precise beam positioning and alignment for various lithography applications. The laser system also contains several advanced safety features to protect the user. This includes a proprietary laser supervision unit which monitors the operation of the laser and shuts it down in case of any unexpected anomalies. It also has a laser beam interlock machine which prevents any accidental activation of the laser, ensuring the beam is properly aimed at the intended target. In addition, ELS 5400 offers excellent customer support and maintenance. The onboard diagnostics and diagnostic software tools allow for easy troubleshooting and maintenance interventions, so downtime is kept to a minimum. The optional filament replacement kit includes all the necessary parts and components, allowing operators to quickly swap out worn or defective components, reducing the time required for maintenance. ELS-5400 offers a powerful, reliable, and highly capable laser tool for maximum precision and performance in a wide range of industrial and research applications. It combines superior laser source technologies with precise control systems, making it an ideal tool for the most demanding applications.
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