Used CYMER ELS 5400 #9293807 for sale

CYMER ELS 5400
Manufacturer
CYMER
Model
ELS 5400
ID: 9293807
Vintage: 1997
KrF Laser 1997 vintage.
CYMER ELS 5400 Excimer laser is a powerful and versatile tool used in the field of microelectronics and semiconductor manufacturing. CYMER ELS-5400 is a pulsed Xenon-Chlorine laser that is capable of producing a wavelength of 193nm. This wavelength is ideal for the etching and patterning of various semiconductor materials as well as for the repair of photomasks used in the lithography and patterning processes of semiconductor devices. ELS 5400 is built using a glass and metal optical cavity with an internal cooling equipment to ensure the system operates safely and efficiently. It can deliver a high energy density with an extremely fast laser pulse and has adjustable spot sizes ranging from 0.7µm to 15µm in diameter. Users are able to select various pulse durations and peak energies based off of their needs. ELS-5400 is equipped with an ion-flow monitor and a humidity indicator to help maintain temperature control within the unit, as well as a visible laser light diode to check the machine's status. CYMER ELS 5400 is designed to provide users with highly accurate ablation strategy while maintaining a low cost-of-ownership. Its user-friendly management and control tool makes it easy to use and gain consistent results in the production of microelectronic devices and components. CYMER ELS-5400 offers a variety of options including integrated automated and manual processing, an integer-controlled stage, support for multiple laser heads, and the option of a line-of-sight or iron-core beam delivery for extreme accuracy. It utilizes advanced optical design and control technologies to deliver superior beam characteristics with beam quality values of up to M 2 <1.7 and a homogeneity of less than 0.2% across the target area. Overall, ELS 5400 is an essential tool for semiconductor manufacturing processes that require high precision and precision control. Its combination of energy, speed, spot size, and adjustable programming make it the perfect choice for a variety of applications.
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