Used CYMER ELS 5610 #9389758 for sale

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Manufacturer
CYMER
Model
ELS 5610
ID: 9389758
Vintage: 2000
Laser Chamber Compression head for 5010 F2 Trap / Vacuum pump gas control module OC Plate GS1 / GS2 AC Distributor Auto Shutter Control module Cables Interface module (2) Bias cables HV Cable Exhaust box Blower motor Part number / Description 04-07200 / LNM s143635 / WSM 05-10032-01 / HVPS for 5010 05-3490-04 / Commutator for 5010 05-08120-01 / Cooling module 05-12096-03 / Blower motor controller 05-11019-02 / MFT Power 2000 vintage.
CYMER ELS 5610 is a state-of-the-art excimer laser equipment designed for high-precision laser processing of thin films and a variety of materials including hard and brittle surfaces. It is an ideal solution for integrated circuit fabrication, direct laser texturing, and other advanced photonic-based manufacturing processes. With exceptional beam quality and pulse energies up to 10 J, ELS 5610 features a competitive resonance frequency of 2 kHz and a compact, ergonomic design for maximum space efficiency. CYMER ELS 5610 is equipped with two standard excimer laser discharge types: single longitudinal mode (SLM) and supermode (SM). The SLM discharge mode is suitable for processing transparent materials, while the SM discharge mode can be used for processing opaque materials. Its advanced trigger architecture supports custom fire rates and the highest shot to shot stability and repeatability of any excimer laser platform of its class. ELS 5610's built-in external cavity absorber eliminates the need for any external absorber and provides robust ablation performance. The laser can be configured with a variety of shutter types including manual diverters, electro-optic shutters, and acousto-optic shutters. It can also be configured with a wide range of beam processors including integrated beam homogenizers, rapid mechanical shutters, optical attenuators, beam expanders, and deflection mirrors. A wide range of optical components are available to best meet the application requirements. CYMER ELS 5610 is capable of scanning up to 160 mm and its integrated motion control system supports all types of 2D or 3D applications. The integrated built-in cooling unit and the advanced power control machine ensure stable operation without any thermal damage to the optics. An integrated power monitoring tool allows accurate beam profiling and provides long-term stability for high-precision, structurally sound integrated micromachining. In order to perform advanced optoelectronics applications, ELS 5610 can be integrated with a number of external optics, including laser medical imaging systems, laser projectors, and 3D imaging systems. An advanced data acquisition asset supports real-time monitoring and data logging, and the model is upgradeable with pulse-width modulation and other advanced features. CYMER ELS 5610 is easy to integrate into existing production processes and is suitable for low-volume production. This highly efficient equipment is a reliable and cost-effective solution for precision manufacturing applications. It provides precise and reliable laser processing for many applications that require high precision and high beam quality.
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