Used CYMER ELS 6400 #9257275 for sale

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Manufacturer
CYMER
Model
ELS 6400
ID: 9257275
Vintage: 2000
Laser Parts: Mega pulse: Chamber: 10,061 Hours LNM: 10,061 Hours WSM: 10,061 Hours 20% Output coupler: 10,061 Hours Cycle: F2 Trap: 451.9 Hours 2000 vintage.
CYMER ELS 6400 is a high-performance laser system designed for use in the production of semiconductor devices. It is a reliable, robust and high-powered laser source that is capable of producing shorter, higher-power laser pulses on a variety of laser targets. CYMER ELS-6400 features a multi-transverse beam emission scheme, which allows it to produce single, double, or triple pulses across a maximum of eight laser target zones. This allows for excellent coverage and excellent processing quality in less time. The laser operates in continuous wave (CW) or pulsed mode, with output power adjustable over a wide range with adjustable pulsewidths. Its pulse duration can be tailored for high sensitivity applications, with the ability to generate pulses as short as 1 picosecond (1 x 10-12 seconds). ELS 6400 has a variety of advanced features, including a high optical power output which allows for increased throughput and better yield. It also incorporates several advanced safety features, such as over-temperature/ over-voltage protection and laser-Interlock for maintaining high laser accuracy. The laser can be applied to a diverse set of applications, such as overlay correction, accurate exposure calibration, removal of thick photoresist layers, and precision dry etching of photoresist layers. ELS-6400 is based on a diode-pumped, solid-state platform which is capable of delivering high average power and precision timing. The laser contains a fiber-coupled laser head to ensure accurate beam pointing and position, with a pulse picker for enable/disable/delay of the actual laser pulsing, as well as adjustable display elements. CYMER ELS 6400 is equipped with built-in diagnostic functions, as well as a USB dongle interface for remote control. This versatile laser system offers clean, efficient, and accurate performance with a low total cost of ownership. The machine is easy to operate and highly reliable, making it an ideal solution for production lines.
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