Used CYMER XLA 160 #194711 for sale
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ID: 194711
Laser for Canon AS3/AS4
Specifications:
Wavelength: 193nm
Average output power: 45W
Pulse energy: 11.25mj
Max. rep rate: 4000 Hz
Bandwidth (FWMH): <0.25pm
2003 vintage.
CYMER XLA 160 is a high-powered pulsed laser designed and fabricated by CYMER, Inc., a subsidiary of ASML Holding NV and the world's largest supplier of light sources used for semiconductor lithography. CYMER XLA160 is a diode-pumped, all-fiber laser designed to provide advanced stability characteristics and superior brightness over long lifetimes. It can generate pulse energies up to 160 mJ or 26 W in single-pulse mode with up to 100kHz pulse repetition rate. The technology found in XLA 160 leverages both distributed Bragg reflector (DBR) and cladding pumped fiber laser (CPFL) architectures. The laser's beam quality is further enhanced by the incorporation of a single-mode gain section, improving the beam profile and angular distribution. These features, along with the laser's large M2, create a highly reliable, stable light source which will provide complex lithography solutions. XLA160 has been designed to meet industry needs for higher energy levels and stringent stability requirements. Its ability to maintain precise and consistent pulse energies over long lifetimes is invaluable to those in the field of advanced lithography. This is especially true as features on integrated circuit designs continue to shrink. By providing increased bandwidth and pulse-to-pulse stability, CYMER XLA 160 is helping to lead the way in advanced lithography applications. Its superior reliability and small size make CYMER XLA160 a popular choice in the laser market. It has a compact design, measuring only 250 mm in length, that easily fits into existing laser housings. XLA 160 is thermally stable and utilizes proprietary thermal management and clamping technology to maintain optimal performance regardless of ambient temperature changes. Not only is XLA160 a robust and reliable laser but it is also cost effective. With its stable output power and highly reliable platform, CYMER XLA 160 eliminates the need for costly spares, allowing for streamlined maintenance and reduced operating costs. Overall, CYMER XLA160 is an advanced laser that brings a number of robust features to the lithography market. It offers high-powered pulse energies, a path-length locking architecture, superior beam quality and angular distribution, and reliable long lifetimes. In addition, its superior thermal management and accuracy, coupled with its cost effective design, make XLA 160 an attractive choice for those seeking advanced capabilities in lithography.
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