Used ABM ABM/8/500/NUV/DCCD/M #293797160 for sale
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ID: 293797160
Wafer Size: 8"
Vintage: 2011
Mask aligner, 8"
NUV / DUV Wavelength
Uniform beam size: 8"
Exposure light source for G-Line, H-Line, I-Line wavelength
Single / Split-field dual CCD Camera alignment system
Single / Split-field microscope alignment system
Double side exposure system
Square area:
< +3% over, 8"
< ±1% over, 4"
< +2% over, 6"
Printing resolution:
<0.5 Micron for vacuum / Hard contact (NUV Exposure)
<0.8 Micron for soft contact
<1 Micron for 50 Micron proximity gap
<2 Micron for 100 micron proximity gap
Alignment accuracy: ± 0.5 micron
500 W for Light source (NUV), 8":
365 nm Output intensity: 18-20 mW/cm²
400 nm Output intensity: 35-40 mW/cm²
436 nm Output intensity: 8-10 mW/cm²
2011 vintage.
ABM ABM/8/500/NUV/DCCD/M is a highly advanced mask aligner designed for high-precision photolithography processes in microelectronics and semiconductor manufacturing. This cutting-edge equipment combines precision alignment features, advanced exposure capabilities, and innovative technologies to meet the demands of modern nanotechnology applications. With its versatile specifications and superior performance, ABM/8/500/NUV/DCCD/M mask aligner offers a comprehensive solution for producing intricate patterns on substrates with utmost accuracy and consistency. The key feature of ABM/8/500/NUV/DCCD/M mask aligner is its 8-inch mask size capability, allowing users to work with larger substrates and create complex patterns with increased efficiency. This expanded capacity is particularly beneficial for high-volume production environments where throughput and yield are critical considerations. The system also offers a 500W NUV (Near Ultraviolet) light source, enabling rapid exposure of photoresist materials with high resolution and excellent uniformity across the entire substrate surface. One of the standout attributes of ABM/8/500/NUV/DCCD/M mask aligner is its advanced alignment unit, incorporating a sophisticated DCCD (Digital Color Compensation Device) technology. This proprietary feature enhances alignment accuracy by compensating for any color-based variations that may arise during the alignment process, ensuring precise overlay of mask patterns onto the substrate. The DCCD technology effectively minimizes alignment errors and improves yield rates, making the machine ideal for applications that demand exceptional precision and repeatability. In addition, ABM/8/500/NUV/DCCD/M mask aligner is equipped with an integrated microscope tool that offers real-time monitoring and inspection of alignment and exposure processes. The high-resolution imaging capability allows operators to verify the alignment quality, optimize exposure settings, and troubleshoot any issues promptly, resulting in improved process control and productivity. The microscope asset can be seamlessly integrated with the mask aligner software for enhanced automation and data analysis, enabling users to streamline their workflow and achieve consistent results with minimal manual intervention. ABM/8/500/NUV/DCCD/M mask aligner also features a user-friendly interface with intuitive controls and customizable settings, making it accessible to both novice users and experienced professionals. The model offers a range of exposure modes, including proximity, soft contact, and hard contact, to accommodate various substrate materials and processing requirements. Users can configure exposure parameters such as intensity, duration, and alignment strategy to achieve optimal results for different lithography applications, from pattern transfer to thin film deposition. Furthermore, ABM/8/500/NUV/DCCD/M mask aligner is designed with robust construction and reliable components to ensure long-term performance and minimal downtime. The equipment incorporates advanced safety features, such as interlocks, alarms, and emergency stop mechanisms, to protect operators and prevent potential hazards during operation. Additionally, the mask aligner can be easily maintained and calibrated using standard procedures, enhancing its overall reliability and cost-effectiveness for semiconductor manufacturing facilities. Overall, ABM/8/500/NUV/DCCD/M mask aligner represents a state-of-the-art solution for high-precision photolithography applications in the semiconductor industry. With its advanced features, versatile capabilities, and user-friendly design, this system offers unparalleled performance and efficiency for producing intricate patterns on substrates with exceptional accuracy and repeatability. Whether for research and development or high-volume production, ABM/8/500/NUV/DCCD/M mask aligner is a valuable tool that empowers users to achieve superior results and drive innovation in microelectronics and nanotechnology.
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