Used BROOKS / PRI AUTOMATION 002-7391-08 #9267822 for sale

BROOKS / PRI AUTOMATION 002-7391-08 mask aligner is a highly advanced tool designed for optoelectronic and integrated circuit patterning. It is capable of producing high-resolution patterns for difficult-to-access fine-line and high-precision photomasks. The mask aligner features a computer controlled X-Y-Theta stage with a platform size of 8"x8" and a 0.5μm repeatability of stage movement for higher-precision alignment. The dual source, dual-frequency deep UV illumination source and linear shutters provide high-quality exposure control and consistent, accurate exposure parameters. The vacuum chuck contact design allows for simple and easy substrate loading/unloading with a variety of substrate materials and thicknesses. Furthermore, the mask aligner is equipped with auto focus feature and digital stage positioning system, allowing the user to select the desired coordinates. An interface is included, enabling the user to directly input coordinates and pattern geometries data. Additionally, the unit can be programmed to execute pre-defined alignments, while manual adjustments are possible with the adjustable masks and stages. Accurate images can be produced with the use of the integrated, 8"x-6" x-y raster laser interferometer which combines laser interferometry with hysteresis-type linear stages. The laser beam's heating system, together with a larger mirror, ensure a tighter alignment, thus ensuring a lower alignment error. The intuitive graphical user interface, with support for additional languages, enables the user to achieve high-quality results quickly and easily. Additionally, a number of safety features are included, such as a lockable monitor and an emergency stop. BROOKS 002-7391-08 mask aligner is an excellent choice for precise and precise photomask patterning and microelectronic fabrication with ease and dependability.