Used CANON MPA 500 Fab #293652734 for sale

CANON MPA 500 Fab is a state-of-the-art mask aligner designed to enable the production of high quality devices in the semiconductor industry. This mask aligner uses a 5-inch field of view and a 5-axis motor drive equipment to accurately transfer patterns from photomasks to wafers with high accuracy and productivity. CANON MPA 500FAB is capable of running a wide range of processes from simple lithography to high-end wet etch applications. It is positioned to serve both prototyping and production operated customers. It offers a wide range of substrate sizes, from 200mm to 4" diameter wafers and beyond, enabling the alignment of high quality devices such as memories and logic. The tool also utilizes a multi-directional beam to ensure even exposure intensity across the mask field. MPA-500FAB also features a proprietary laser-guided alignment system that allows for automatic alignment of the masks and wafers. This unit offers 0.3 micron resolution and an accuracy of 1 milliradian, allowing it to produce high-yield devices. The emitter source is highly optimized to produce a stable and uniform pattern across the wafer, even with changes in exposure settings. CANON MPA-500FAB meets stringent environmental requirements and can be used in either wet or cleanroom manufacturing, depending on the type of device. It also offers multiple safety features such as sensor-enabled safety covers, door locks and user/teaching interfaces. Maintenance is also made much easier with the use of a sophisticated automatic self-diagnostics machine, which can alert the operator to any potential problems before they cause production downtime. In conclusion, CANON MPA 500-FAB is designed for extremely high accuracy and productivity and offers a broad range of capabilities to serve both prototyping and production customers. It is built to meet various environmental requirements, such as cleanrooms and wet-etch production, and features a number of safety features, with features such as a self-diagnostics tool and a laser-guided alignment asset to ensure the highest yields from production processes.