Used CANON MPA 500 Fab #9373199 for sale
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CANON MPA 500 Fab is a mask aligner capable of producing high fidelity and high precision photolithographic processes. It features state of the art optical alignment technology and is capable of achieving a positional accuracy of 20 µm with alignment time of 8 seconds. Its digital signal processing technology enables ultimate alignment accuracy with repeatability of 0.5 µm in X and Y-axis direction. The equipment is equipped with advanced multi-lens imaging system and microscopy objectives to achieve chip to chip alignment accuracy with +/- 3 µm in worst case. It is designed to minimize distortion of the mask image allowing different rotating exposure configurations between mask and chip for evenly distributed exposure repeatability. The unit is also designed to minimize accumulative errors which may cause aberration of the mask pattern by resetting the alignment after each exposure. CANON MPA 500FAB utilizes a built-in exposure database which allows up to 20 programmable exposure parameters, and exposure durations, providing high throughput with repeatable alignment results. Its user-friendly graphical interface provides instant feedback while allowing fast programming of the alignment process. The machine features offline alignment and off-axis illumination tool for die-to-die or non-through-hole device alignments. It comes with a large display and ergonomic panels for easy operation. The asset includes a microcontroller that incorporates standard non-volatile memory for storage of up to 10 photos and 60 alignments. MPA-500FAB supports a wide variety of wafer sizes from 25mm to 200mm. The model is enclosed in a modern, sleek design that features integrated dust management equipment. Overall, CANON MPA-500FAB is a reliable, easy to use and intuitive solution for photolithography process with outstanding performance and accuracy. It provides versatility, speed and efficiency that meets the challenging demands of the modern chip industry.
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