Used CANON MPA 500 Fab #9410722 for sale

CANON MPA 500 Fab is an advanced mask aligner used in the fabrication of integrated circuit (IC) wafers. This device utilizes a precise, automated alignment process that alleviates the need for manual alignment of photomasks and IC wafers. CANON MPA 500FAB uses a high-resolution video inspection equipment and a non-contact displacement detection system to ensure precise alignments of the visible markers and precise pattern boundaries. The mask aligner is designed to maintain the wafer flatness during the alignment and lithography process. The device further features a precise beam scanning and positioning unit, which provides a smooth transition for precision overlay capability. MPA-500FAB is equipped with a high-precision stage which offers fast scanning speeds and accurate positioning. Additionally, the device features a high-precision focus servo machine which allows the beam to be focused in the correct pattern area with highly accurate results. The mask aligner is equipped with a CCD imaging tool and a multi-wavelength illumination asset that facilitates seamless layer alignment. Further, the device is capable of exposing up to 100nm line and space patterns and has a maximum exposure area of 200mm x 200mm. To ensure fast, accurate, and precise exposure accuracy, the device includes a multi-zone exposure control model and a high-resolution auto-correction equipment. CANON MPA 500-FAB is capable of operating at high throughput levels, with a throughput of 120 wafers per hour. The device is capable of completing multiple exposure processes in one cycle, making it suitable for high-volume mass production. The device requires only minimal maintenance, utilizes a simple user interface, and meets ANSI safety standards for long-term reliability.