Used CANON MPA 500FA #293592855 for sale
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ID: 293592855
Wafer Size: 5"
Vintage: 1982
Aligner, 5"
(2) Accessories packing
Lamp power supply
Missing parts:
CTR Box
Conversion kit
Generator
Air press unit
1982 vintage.
CANON MPA 500FA Mask Aligner is a device used to accurately manage the transfer of microscopic patterns from a stencil (or mask) onto an assigned substrate. It is an essential piece of equipment in the fabrication of microelectronic components and devices, as well as in the production of photonic and micro mechanical structures. CANON MPA-500FA provides fast, high precision mask alignment with both fixed and variable step sizes as well as XY and XYΘ alignment. It also incorporates a patented Auto Align and Auto MOVE functions for quick and reliable alignment. MPA 500 FA uses charge coupled devices (CCDs) for enhanced alignment accuracy. It also features a designed-in advanced cooling system that helps reduce thermal drift and the need for manual steps pre-alignment. It is designed with advanced filtration and flowspur elimination functions that reduce particle contamination of the masking surface. MPA-500FA has a sensitive wafer stage with a stroke of 15mm by 15mm, and a reliable distance measuring system (DMS) of +/-0.02µm using a PSD. It has a stage speed of 50mm/s, and a pattern size range of 1mm to 20mm with minimum pattern step sizes of 0.05mm, providing greater accuracy throughout the stages and mask aligning processes. Furthermore, CANON MPA 500 FA is equipped with various alignment modes to support a range of closely-spaced patterns, fine patterns, and even ultra-fine patterns. It also offers a host of exposure modes, including direct dual distance (D2D), dual exposure (DE), and single exposure (SE). MPA 500FA provides an effective and agile alignment to faithfully transfer and reproduce your design pattern. It is reliable, efficient, and cost-effective, making it ideal for producing large-scale and low-cost nano- and micron-scale devices.
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