Used CANON MPA 500FA #293592856 for sale
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ID: 293592856
Wafer Size: 5"
Vintage: 1995
Aligner, 5"
Control box
CTC Unit
(2) Accessories packing
Lamp power supply
1995 vintage.
CANON MPA 500FA is a next-generation mask aligner designed for semiconductor device processing. It is a versatile and reliable tool that is suitable for research and development as well as industrial production. CANON MPA-500FA has an automated equipment that ensures precise alignment and exposure parameters. MPA 500 FA is designed to achieve a resolution of up to µm, with an alignment accuracy of up to 0.1µm. It features a large field of view of up to 4" × 4", allowing for precise alignment of larger sized wafers. It is equipped with a 6-axis accretion microscope, which allows for accurate adjustments of the precise distance between the mask and the wafer. CANON MPA 500 FA also features Rapid Alignment mode, which allows for quickly adjusting the alignment to the minute details of a mask without having to completely reload the stage. This significantly increases throughput by reducing the time needed for precision alignment. It also features remote adjustment control, allowing control of the alignment parameters to be remotely maintained. MPA-500FA is designed with a simple and robust control system, featuring a touch panel interface. The integrated monitor allows operators to closely monitor the alignment process, making it easy to maintain precise guidelines. The self-diagnostic unit also helps ensure that corrections are made quickly and accurately. MPA 500FA is also equipped with advanced imaging systems, which allow for manual, semi-automated, or automated operation. It features high-resolution imaging systems, both for alignment and exposure parameters. Its WADI imaging machine also allows for precise imaging with high accuracy. CANON MPA 500FA is designed with an integrated safety tool, which helps protect personnel and equipment from any unforeseen mishaps. It is equipped with an improved exhaust asset, which is designed to keep personnel safe by keeping the environment free from by-products. Finally, CANON MPA-500FA is designed to be energy-efficient, with a low power consumption. It also features a compact design, which allows it to be placed in almost any environment. This makes it an ideal option for any application requiring precision and convenience.
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