Used CANON MPA 500FA #9226337 for sale

CANON MPA 500FA
Manufacturer
CANON
Model
MPA 500FA
ID: 9226337
Wafer Size: 5"
Vintage: 1984
Aligner, 5" 1984 vintage.
CANON MPA 500FA Mask Aligner is a precision tool designed to produce top-notch microstructures with maximum accuracy and consistency. It facilitates critical processes that involve transferring lithographic patterns to wafers, such as photolithography, and image transfer. This tool is suitable for various industries, including semiconductor, optoelectronics, microelectronics, microfluidics, and biomedical. The machine is equipped with a precision-aligned 5-axis motion system, allowing for fast and accurate performance. Its standard working area is 500 mm x 500 mm, and this can be further expanded up to 1500 mm. CANON MPA-500FA offers advanced productivity features, such as auto-load/unload, auto-align and high-speed alignment. In addition, it boasts an intuitive control system, plus tool-less stepper and scanned laser alignment. This tool provides automated setup operations via an integrated user-friendly interface. It also features a built-in camera that supports optimized imaging and full-circle digital mask inspection capabilities. In addition, MPA 500 FA is equipped with a dedicated substrate anti-reflective coating system that offers improved image contrast. Other features of the machine include compatibility with various lithography formats such as optical and electron-beam types. It also comes with optimal exposure optimization controls that accommodate for parameter variations, as well as real-time auto-focus capability and multi-image comparison. Moreover, it is equipped with fast-scanning masks that allow for quick exposure without compromising accuracy. Overall, CANON MPA 500 FA is a highly sophisticated and easy-to-use tool designed to produce top-quality and high-resolution microstructures with maximum accuracy and consistency. It helps to significantly reduce substrate processing time while ensuring excellent results.
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