Used CANON MPA 600 FA #293625511 for sale
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CANON MPA 600 FA is a high performance mask aligner equipment designed to perform patterning processes used in the manufacturing of semiconductor devices. This system features an automated, high-speed and high-precision mechanism for cut mask registration. The unit uses a combination of air bearing-mounted stages, laser interferometers and closed-loop servo positioning and alignment that controls on both the XY and rotational axes simultaneously. CANON MPA600FA machine features high accuracy precision and repeatability in pattern alignment and allows for independent vertical movement of the stage, making it easy to handle probes, pins and other patterning tools. The tool also features a high-resolution and high-contrast image processing asset, allowing it to accurately detect and measure the elements in the pattern. Its advanced optical model, with 6x F-Theta lens provides high-quality imaging which ensures precise edge-alignment of photomasks. The equipment uses an air bearing-mounted stage which provides smooth and low-vibration stage movement to ensure highly accurate alignment and printing performance. It also facilitates easy maintenance and offers long-term reliability and environmental robustness. The system ensures precision placement of patterns on the substrate, with a positional accuracy of 0.5µm. MPA-600FA unit also offers a variety of high-end automated functions, such as mask fabrication, patterning, sputter deposition, photoresist coating, and etching processes. This machine also offers a Quick Aligner™ feature, able to quickly detect and correct any misalignment of patterns within a few seconds for fast and accurate results. In addition, CANON MPA 600FA offers a wide range of software options and features to support automated and unified process control. It has an intuitive software interface for easy tool setup and programming, it can also be integrated with existing software and hardware systems allowing for easy integration and operation. TheCANON CANON MPA-600FA asset was designed to perform rapid, accurate and repeatable photomask alignment and enables stable production performance. It is suitable for a wide variety of electronics and optoelectronic applications and is a reliable and powerful mask aligner model solution.
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