Used CANON MPA 600 FA #9109111 for sale

CANON MPA 600 FA is a state-of-the-art mask aligner for applications such as nanomanufacturing, nano-imprint lithography (NIL) and thin-film deposition. It has been built with industry-leading standards and is capable of precision fabrication and analysis at the sub-micron level. The centrepiece of CANON MPA600FA is its powerful 63-Watt CO2 laser, which generates extremely high exposure intensities and depths of focus. This allows for extremely precise, uniform exposure of mask patterns onto a variety of different substrates, from photo-resist wafers to glass and silicon materials. With its high resolution of 0.01 µm, it is compatible with most features found in current integrated circuit (IC) designs. In addition, MPA-600FA is equipped with two precision-controlled, 6-axis linear motor stages. These stages allow for accurate and reproducible pointing accuracy, giving it the potential to perform alignment applications on fine detailed structures at high speeds. The machine is further enhanced by CANON patented MAVIC/AFH (Multi-Axis Variation Control and Auto-Focus Height) technology. Through the use of built-in adaptive sensor heads and computational feedback, the MAVIC/AFH system allows for dynamic control of the motion tableer, automatically preventing errors due to layout design and substrate variations. Furthermore, CANON MPA-600FA is fitted with an advanced operation control system that enables easy and efficient operation. Through the use of EtherCAT network, users can easily access process control/monitoring systems, allowing them to monitor and control machine status and modification from any computer remotely connected to the machine. To ensure smooth production, the mask aligner is also equipped with a heated vacuum chuck and vacuum pump, which together can deposit just the right amount of vacuum in order to hold substrates in place. Finally, CANON THERMON provides advanced temperature management capabilities for the mask aligner. This helps to maintain an optimal temperature for the various components of the machine, ensuring that exposure accuracy is maintained. MPA 600 FA is thus an incredibly versatile tool for precision fabrication and analysis. With its industry-leading standards and advanced features, MPA600FA is sure to become a mainstay in a variety of fabrication workshops.