Used CANON MPA 600 Super #9033449 for sale
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ID: 9033449
Wafer Size: 6"
Mask aligners, 6"
Specifications:
Exposure performance:
Exposure field: R 95 mm
Resolution: ≤ 1.4 um
Exposure wavelength: 365 nm i-line, 405 nm h-line, 436 nm g-line
Reduction ratio: x1
DOF: ± 6 um (1.5 um line and space)
Illuminator:
Light source: 2.0 kW Super high pressure mercury lamp
Intensity: 550 ± 50 mW
Uniformity: ± ≤ 3%
Wafer alignment:
Alignment light source: He-Ne laser (633 nm)
Alignment system: HE-NE TV AA
Auto PDC
Alignment accuracy: LBS-AA ≤ 0.54 um; TV-AA ≤ 0.40 um
Scanning mechanism:
Scan drive unit: Scanning the carriage unit by linear motor drive
Scan range: 4", 5", 6"
Scanning speed: 4.0 - 150.0 sec (31.3 mm/sec to 0.83 mm/sec)
Focus error: Arc focus less
Alignment scope:
Viewing scope light resource: Halogen lamp
Erector lens:
Viewing lens: Auto moving
Erector: 1x, 2x, 5x
Mechanical pre-alignment:
Pre-alignment accuracy: ≤ 60 um.
CANON MPA 600 Super is a motorized mask aligner designed for the production of 8-inch, 12-inch, and 13-inch circumference masks during the fabrication of fine-line patterns. It utilizes a laser autofocus equipment to precisely align the mask and wafer substrates and utilizes an advanced motorized stage control system for overlay accuracy. CANON MPA600SUPER is capable of producing masks with minimum line widths of 0.25 microns and spacing of 0.2 microns. The mask aligner has a highly reliable exposure imaging unit which uses an adjustable 6-laser beam arranger that includes quad laser raster with raised/lowered laser lines. The laser raster coordinates precisely with the motorized stage movement, providing a non-reflective machining environment to ensure high-quality patterning in the image. A process-controlled exposure machine simplifies the entire mask process by allowing users to quickly select an exposure pressure and step size to suit the job. MPA-600SUPER also has an alignment monitor display that provides comprehensive alignment information to the user. It includes joystick control of the stage, which allows for convenient and accurate placement of the mask and substrate. The large 19-inch color monitor also provides a more detailed display for a larger view of the alignment process. This mask aligner has a scanning tool that utilizes non-contact direct-drive encoders which reduce the time and expense associated with conventional autofocus systems. Its step motor control provides accuracy during motion of the stage, with high precision registration during adjustment of the laser raster. MPA-600 SUPER has a series of built-in safety features designed to protect the user and the equipment during operation. This includes an interlock asset that prevents the laser from operating when occupational safety is not maintained, as well as an emergency stop button that can be pushed for an immediate halt in operation. Overall, CANON MPA-600 SUPER is a fully featured motorized mask aligner designed for the production of high-precision patterns. Its components allow for positioning accuracy and exposure precision, while a range of safety features protect the user and the equipment. As a result, the mask aligner is well suited for a range of mm, cm, and sub-micron applications.
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