Used CANON MPA 600 Super #9057709 for sale

CANON MPA 600 Super
Manufacturer
CANON
Model
MPA 600 Super
ID: 9057709
Wafer Size: 6"
Vintage: 2000
Mask aligner, 6" 2000 vintage.
CANON MPA 600 Super is a top of the line mask aligner designed for professional use. It offers a broad range of capabilities in the field of photolithography and wafer-level packaging technologies. The machine can handle a wide variety of masks with various patterns and thicknesses as well as with up to one third the size of a 200mm wafer. CANON MPA600SUPER is equipped with a three-axis, eight-zone, single-sided optical equipment, providing precise alignment of the alignment marks and device features on the wafer. The design of the system allows for large field scanning with multiple areas of focus, eliminating the need for multiple passes over the wafer. Additionally, the unit has a built-in alignment mark detector, which is used to precisely align the mask on the wafer. The machine is designed for high-throughput operation and can process up to 3000 wafers per hour. The machine features a state-of-the art digital signal processor as well as a PID controller, ensuring accurate and consistent process control. Additionally, it utilizes a patented RF impedance matching technology for very precise alignment. In terms of features, MPA-600SUPER offers a comprehensive list. It provides a 1-µm automatic step size; a 3-zone projection lens for uniform irradiation in all areas; a focus finder feature to simplify manual alignment; and an optical defocus control adjustment for fine tuning. It is also equipped with an auto-tune laser, which automatically adjusts for the optimum intensity of the focusing laser and spot size. Furthermore, the tool has an automated wafer lifter, enabling the user to easily remove wafers and to load them from the alignment chamber. Additionally, it has an integrated UV diode laser for accurate pulse control for exposure. Overall, MPA600SUPER is a top of the line mask aligner designed for professional use. It combines advanced technology with easy-to-use features, enabling high-quality and accurate processing of wafers and masks in a range of applications. Utilizing the asset's patented RF impedance matching technology and state-of-the-art digital signal processor, it provides precise alignment as well as quick, consistent, and reliable performance for high-throughput operations.
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