Used CANON PLA 500F #293604246 for sale

Manufacturer
CANON
Model
PLA 500F
ID: 293604246
Mask aligner.
CANON PLA 500F is a mask aligner used in manufacturing semiconductors. It is designed to efficiently align the pattern of masks over the semiconductor substrate and accurately transfer the pattern onto the substrate. PLA 500F is a high-precision device that utilizes a Vacuum Scanning Electron Microscope(VSEM) which can accurately detect a silicon substrate. It also uses a high speed scan lens and a full field of vision optical system for precise alignment performance. CANON PLA 500F's mask holder's XY precision is 2-micron and the XY resolution is 0.2 micron. It also has advanced feature such as dual pattern alignment, true overlay, and low fin pitch alignments for a precise masking process. The VSEM has a resolution of 50 nanometers and a size range from 200-500 microns. The drive motor used can reach a maximum speed of 80 micro-steps/s. PLA 500F comes with an integrated control system, consisting of a Windows based GUI, an easy PC communication interface, and intuitive control software. CANON PLA 500F also comes with a high speed electromagnet with an operating range of 0.3 to 1000 G. PLA 500F utilizes proprietary algorithms and techniques to provide precise and accurate alignment without compromising speed or accuracy. This makes it ideal for precise alignment of through-plated-holes, CMP vias, and small local layers. CANON PLA 500F also supports a variety of software, including lithography software and imaging libraries. Additionally, PLA 500F is equipped with an advanced vacuum chamber, which is filled to a low pressure and certified for hazardous materials. It is also equipped with an advanced cooling system, which ensures that the temperature remains constant for precision alignments. CANON PLA 500F is a reliable and precise tool for aligning masks and is essential for creating precise semiconductor products. It is an excellent choice for both new technology and legacy manufacturing needs.
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