Used CANON PLA 501 FA #293592858 for sale

Manufacturer
CANON
Model
PLA 501 FA
ID: 293592858
Wafer Size: 5"
Vintage: 1983
Mask aligner, 5" Control box (2) Accessories packing Lamp power supply 1983 vintage.
CANON PLA 501 FA is a mask aligner which is used for fabricating large-area micro and nanoscale devices. It is designed for taking patterned photoresist materials and depositing them onto substrate surfaces. CANON PLA-501FA is a fully automated mask aligner with a high degree of accuracy and repeatability, making it a great tool for large-scale production of precision parts. The machine combines excellent alignment capabilities with quickly adjustable parameters such as exposure times and resolutions. PLA 501FA includes a high resolution optical microscope, laser system, and auto-focus cameras, which allow for rigorous alignment and repeatable quality of the finished device. It utilizes a vacuum chuck that enables solid vise support and a direct movement of the X and Y stages for precise positioning of the mask and substrate for each overlay. CANON PLA 501FA also has a resist dispensing feature that enables thick resist applications and high-speed spin coating during ultraviolet light exposure. This feature allows for excellent control and uniformity of the coating layers that are deposited onto the substrate surface. PLA-501 FA has an open architecture for optical systems, and is capable of supporting N series block mask holders which can be used for high-precision alignments. Furthermore, the machine offers maximum flexibility with a variety of drive technologies, enabling simultaneous production of multiple devices on a single machine. The machine has a robust and efficient operation that provides automated e-beam control, high accuracy lithography, and excellent repeatability. It also has a low-residue design which enables the optimal adherence of resist layers to the substrates. Overall, CANON PLA-501 FA is an excellent mask aligner for high-volume production of micro and nanoscale devices. It provides an excellent balance of cost, performance, and accuracy, allowing cost-effective production of precision parts.
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