Used CANON PLA 501 FA #293621589 for sale

Manufacturer
CANON
Model
PLA 501 FA
ID: 293621589
Wafer Size: 3"-4"
Mask aligners, 3"-4" Mask size: 4", 5" Thickness: 0.06", 0.09".
CANON PLA 501 FA is a state-of-the-art mask aligner that offers users a high level of accuracy and precision in their photolithography processing. It is suitable for both educational and industrial applications. CANON PLA-501FA is designed to provide very high resolution mask transfer and wafer positioning with an alignment accuracy of less than 3 μm (or 0.12 mils). It features an alignment equipment that combines a 4-axis travel stage with an optical sensor, giving users easy and accurate registration of masks with high confidence. Additionally, the system can accommodate both SMIF and ProSTEP formats as well as CanLiv 5.5 and larger photomasks. The unit also offers several other benefits, such as its fast wafer loading capabilities, and an exposure machine with a 33.4 msec exposure time, a 3600 X 3600 dpi resolution, and a print accuracy of 1.2 μm (or 0.049 mils). In terms of its built-in safety features, PLA 501FA includes an emergency stop switch and light curtains, as well as ESD protection and an auto-maintenance tool. Additionally, the asset is approved for safety under ISO 9001, EN -9002, and JIS standards. CANON PLA-501 FA utilizes direct-drive linear motors, which ensure that the stage is always in stable movement and that mechanical backlash is eliminated. Additionally, it has a built-in humidity and temperature sensors, which can be set according to the user's specific conditions and requirements. Finally, this model is also equipped with an anti-ripple function, which reduces environmental noise and improves print accuracy and stability. Overall, CANON PLA 501FA is an excellent choice for both industrial and educational users who are looking for a reliable, accurate, and user-friendly photolithography model. Its various safety features and precision alignment equipment make it an ideal option for a wide range of applications.
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