Used CANON PLA 501 FA #293674409 for sale
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CANON PLA 501 FA is a micro-lithography mask aligner designed to pattern IC chips used in the electronics industry. This device is highly accurate and capable of controlling pattern alignment with a precision of up to 0.3 micron. CANON PLA-501FA is a mask aligner used to perform direct exposure on multiple substrates such as silicon, polyimide and Kapton. It consists of a precision-positioning stage which can move the substrate in three axes and accurately align it with the mask set. This positioning stage can support substrates with a maximum of 7-inch in diameter and thickness ranging from 1 - 6mm. The equipment utilizes a CANON made, high resolution lens assembly with a numerical aperture of 0.60, a projection lens magnification of 0.63, and a working distance of 8.0mm. This lens assembly can provide a full-field ultraviolet projection exposure with a minimum resolution of 0.3 micron. PLA 501FA has fast scanning and tracking capabilities, allowing it to produce high-precision masks in a short amount of time. The system is equipped with a CANON made optical interferometer which is used to monitor planar, linear and angular displacement of the substrate's surface with each exposure to ensure proper alignment. This interferometer is coupled with a highly sensitive Microscope Autofocusing unit which can accurately align the substrate surface with the mask set. The machine can be operated in a manual, semi-automatic, or fully automatic mode, allowing it to be easily adapted to various requirements and working environments. To prevent contamination from the environment, air purified by an ionizer is constantly supplied. Additionally, an infrared camera is integrated into the tool, providing an overlay exposure image that can be used to dynamically track the position and exposure area of the mask over the wafer. Overall, PLA-501 FA mask aligner is capable of providing pattern alignment with a precision of up to 0.3 micron, making it a valuable tool for IC chips in the electronics industry.
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