Used CANON PLA 501 FA #293763589 for sale

Manufacturer
CANON
Model
PLA 501 FA
ID: 293763589
Mask aligner.
CANON PLA 501 FA is a full-field laser assisted alignment (FA) mask aligner with a functional layer size of 12 microns and a step resolution of 12.5 nanometers. This mask aligner is suitable for high resolution photolithography, as well as ultra precise fabrication. One of the major applications of CANON PLA-501FA mask aligner is integrated circuit (IC) fabrication. It is extensively used in semiconductor lithography processes, since its large working area, full-field focusing, and high precision capabilities facilitate the fabrication of high-performance ICs. PLA 501FA features a 25-point X-Y stage, six active alignment patterning positions, and two mask changers. This allows for parallel alignment and patterning capability, greatly enhancing throughput and improving overall productivity. The mask aligners's 12-micron spot size ensures ultra high resolution and precision, while the 12.5 nanometer step resolution provides the accuracy and repeatability required for advanced application tasks. PLA-501 FA is a robust and reliable system featuring several powerful features, including a built-in trace pattern analyzer and a graphical user interface. The trace pattern analyzer allows for visualizing the topographies of patterns, while the user interface simplifies operation. The system has a high photo current, enabling high-dose exposure of photomasks without any accompanying distortion. This helps achieve excellent results with minimal misalignment and distortion. CANON PLA-501 FA is further equipped with an optional on-axis digital protection element (OPE) aligner, which allows for precise digital protection element (OPE) alignment when transferring data from IC designs to wafer patterns. This ensures that source and target data can be flawlessly transferred while remaining accurate throughout the photolithography process. PLA-501FA is compatible with a wide range of photomasks and resists, and can handle a variety of photolithography applications. It also features an intelligent alignment capability, reducing the time and effort required for manual alignment. Overall, CANON PLA 501FA is designed for high resolution and accuracy, making it an ideal choice for lithography applications. Its robust features, powerful capabilities, and multiple features make it a reliable and highly efficient mask aligner for any IC fabrication needs.
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