Used CANON PLA 501 FA #9142669 for sale

CANON PLA 501 FA
Manufacturer
CANON
Model
PLA 501 FA
ID: 9142669
Wafer Size: 2"
Vintage: 1988
Mask aligner, 2" Process: Photolitho 1988 vintage.
CANON PLA 501 FA is a fully automated mask aligner specifically created for the semiconductor packaging and hybrid industries. This device offers a high-speed pattern processing solution with 4-micron positioning accuracy to quickly finish photomask alignment tasks. CANON PLA-501FA is part of the series 5000 line of mask aligners and serves as a premier photolithography system for precision photoplotting and other key production processes. It allows direct imaging onto quartz or panel masters using UV lasers, making real-time mask exposure possible without requiring steps for film processing. PLA 501FA is equipped with various advanced features that enhance its usability and accuracy. It is built with a nanometer-level micropositioning system for precise alignment between alignment mark and pattern of the sample board. Additionally, it has a fully automated wafer load-reticle exchange mechanism that reduces process time and the chance of human error. The device also possesses an advanced diffuse reflection coverage sensor that monitors the entire operation surface for improved lithography processing and more accurate exposure control. PLA 501 FA can also be connected to a PC for connecting and controlling the device while also allowing easy archiving of photolithography jobs. The combination of PLA-501 FA and a PC allows for real-time monitoring of mask exposure, which improves operating efficiency. The device is also ready-to-use, with no additional user preparation time or special settings required. PLA-501FA is also a robust and reliable system due to its energy efficient, highly durable components. Along with excellent wafer alignment accuracy of 4 μm between mark and wafer/mask, these components help the aligner maintain peak performance without wearing down. This makes the device suited for use in industries with stringent production requirements and fast-paced workflows. Finally, CANON PLA 501FA is designed for low-maintenance operations and can run for extended periods without needing maintenance or calibration checks. It is also compatible with most quartz or hybrid plates and substrates, making it a great choice for various industrial disciplines.
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