Used CANON PLA 501 FA #9276651 for sale

CANON PLA 501 FA
Manufacturer
CANON
Model
PLA 501 FA
ID: 9276651
Lithographies.
CANON PLA 501 FA is a top-of-the-line mask aligner that is used in the manufacture of semiconductor devices. The mask aligner utilizes an optical system with a laser light beam for pattern projection and stepper motors for pattern transfer. This allows for a precision alignment of mask patterns to substrate patterns during lithography. The accurate pattern transfer is essential for device production. CANON PLA-501FA offers excellent throughput as well as superb pattern registration. Its optical system features a wavelength of 355 nm and its stepper motors are capable of movement increments of 0.6 μm. The maximum frame size for the mask aligner is 450 mm x 450 mm. In terms of accuracy, the mask aligner offers registration and line-width resolution of 0.2 μm. PLA 501FA is also designed to minimize particle contamination. It is equipped with a particle-elimination filter module and a discharge shutter. This allows for the removal of airborne particles in a confined area within the mask aligner. In addition, the mask aligner offers high-speed scanning. The scanning time is 0.1 sec for a full-size 250 mm x 250 mm frame. The overall design of PLA-501 FA is that of a compact and user friendly equipment. It offers an ergonomic control panel, a microprocessor interface, and a simple set-up feature, which allows for quick and smooth operation. Furthermore, the mask aligner also comes with a data logger, allowing users to record optical system data and track it in the long run. All in all, PLA 501 FA is a highly dependable and efficient mask aligner. Its accuracy, speed, and contamination control make it an ideal choice for many semiconductor companies. It is a great choice for those who need to produce the highest-quality components in the shortest amount of time.
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