Used CANON PLA 501 FA #9395478 for sale

CANON PLA 501 FA is a high-performance Mask Aligner designed for production use. It provides advanced process capabilities while offering high throughput, high precision, and ease of operation. CANON PLA-501FA features a newly designed Laser Optical Equipment, Low Repetition Rate Laser Source, and automated processes for wafer alignment and loading. PLA 501FA's Laser Optical System facilitates the utmost in precision alignment of substrates and masks. The Low Repetition Rate Laser Source produces quick and precise exposures, resulting in minimal heat damage to the substrate and masks during the alignment process. The automated processes simplify substrate and mask alignment, offering high throughput. The integrated wafer controller permits maximum flexibility in automated wafer loading, along with increased productivity and improved uniformity of the alignment process. CANON PLA-501 FA is capable of exposures down to a 25nm pitch, and is capable of tolerances better than the state-of-the-art for both overlay and focus. The unit utilizes an Exposure Head that is capable of 1440 nm exposures for 5x reduction capabilities. The Optics and Electronics Specifications are designed to support 25 to 80,000nm pulse rates. Both manual and automatic alignments can be done with CANON PLA 501FA, making it a flexible and reliable machine for production requirements. PLA-501FA also offers a range of safety and quality assurance capabilities. It can be configured with an UltraViolet oil-free alignment tool. Its advanced safety design ensures that all components are isolated for the utmost in safety. An advanced cooling asset is designed to ensure the model is operating at a stable temperature for optimal performance. PLA 501 FA is designed to offer maximum quality and throughput with minimal maintenance. Its advanced features make it an excellent choice for wafer and mask alignment in production environments. With excellent process capabilities, high-precision exposure, and built-in safety features, PLA-501 FA provides a cost-effective solution for production requirements.