Used CANON PLA 501 #293592025 for sale

CANON PLA 501 is a full-field mask aligner, used for lithography and semiconductor device manufacturing. It is a high-precision non-contact aligner that utilizes a beam of light to achieve precise transfer alignment, allowing for accurate patterning of features on a semiconductor substrate. CANON PLA-501 features a high-resolution scanning equipment and a high-NA lens, which enables strongly focused patterning with a wide dynamic range. The 1050nm wavelength laser used has a high contrast and deep focus, and can effectively transfer a range of different feature sizes with high accuracy. The machine's high-accuracy, high-resolution process can transfer aligned micro-lithography patterns accurately, with a 0.1um achievable feature size. Its projection field is quite large, allowing for a wide variety of die sizes to be processed. Its photoresist coat system features a uniform coating capabilities with a film thickness precision of within 2%. PLA 501 is equipped with CAD/CAM control capability, and features a new pattern setting GUI for reduced set-up times and less manual operation errors. It also includes a matrix layout facility with automatic alignment, tilt and rotation functions and a special wafer mapping function is available to enable quick and accurate inspection of wafer flatness. PLA-501 uses an advanced evaporative cooling unit that eliminates thermal effects and movement distortion, providing the highest accuracy and repeatability possible. The machine runs at a low frequency that eliminates acoustic noise during operation. A 14-segment irradiation generator produces uniform irradiation and allows for fast processing maintenance-free operation. In addition, the mask aligner is equipped with an advanced CMOS detector that provides high sensitivity and low dark current measurements, helping to ensure high-end alignment accuracy at all times. CANON PLA 501 is a user-friendly machine that is also highly reliable, with a long maintenance interval, given its robust interlocked machine and high-speed inspection functions. The automatable process and easy-to-use features make CANON PLA-501 an ideal choice for high-precision mask aligner applications.