Used CANON PLA 501 #293643206 for sale

Manufacturer
CANON
Model
PLA 501
ID: 293643206
Mask aligner.
CANON PLA 501 is a device used in the fabrication of semiconductor devices. It is a mask aligner, which is a tool used to accurately position a photomask pattern over a target substrate so that portions of the pattern can be focused and then exposed to light. This allows for precise alignment of the pattern with the semiconductor device being produced, leading to higher yields and better performance. CANON PLA-501 is a stepper, meaning that it uses step-and-repeat technology to accurately align and focus the photomask pattern. It features a maximum alignment accuracy of 1.5µm, a maximum release angle of 10°, and a maximum field size of 10mmø. It is equipped with both a telecentric optics system and a polygonal mirror scanner, allowing for both high accuracy and oversampling capabilities, resulting in better image sharpness even at higher magnifications. The laser source has an average output of 450mW, with a voltage range of 10.5V to 12V, suitable for both near-ultraviolet and visible absolute exposures. PLA 501 is a highly automated system, with a programmable digital process controller and a monitoring system for in-depth process analysis. The user interface is user-friendly and highly intuitive, with simple controls for changing parameters, monitoring in-process data, running diagnostics, and managing user accounts. The software architecture is divided into three main modules, consisting of the process module, the operation module, and the maintenance module. PLA-501 is designed to work in a cleanroom environment, as with many mask aligners. The device has built-in filters and baffles, as well as specially designed noise and vibration suppression systems, so it can be used in a strict cleanroom with minimal disruption to the environment. To ensure the smooth and safe operation of the device, CANON offers a wide range of consumable products, such as photoresists, cleaning agents, and lens maintenance fluids. CANON PLA 501 is widely used in the semiconductor industry, and is set apart from its competitors by its superior accuracy, speed, usability, and reliability. With its compact size and advanced technology, it can meet the most demanding fabrication requirements and can be used for a variety of applications, such as thin film transistors, dense memory technologies, and optoelectronics.
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