Used CANON PLA 501 #293717420 for sale

CANON PLA 501 is a fully automated precision mask aligner, designed for advanced micro-electronics research and high-precision photolithography applications. It is capable of providing high-resolution alignment of substrates and masks, as well as rapid, repeatable imaging. CANON PLA-501 has a tool stage size of 4 inches by 4 inches and a maximum substrate height of 6mm from the tool stage. It is equipped with a 254nm UV laser source and a computer-controlled galvanometric scanning mirror equipment that enable high-precision alignment. The system also features an XY and μZ stage, allowing highly accurate movements of the substrate and mask to suit the configuration requirements of each experiment. PLA 501 has a sophisticated exposure control unit, allowing users to adjust exposure parameters including pulse width and wavelength, exposure time, and exposure dose ratio. It also features a manual override mode, allowing the user to manually set exposure parameters without affecting the preset values. PLA-501 comes installed with a comprehensive process control software package. The software package allows users to create, edit and execute recipes, monitor process status and collect experimental data. It also permits the remote control of the machine, allowing for fully automated exposure runs. In terms of maintenance, CANON PLA 501 is equipped with an intelligent self-maintenance tool that regularly inspects its components and informs the user of required maintenance. Furthermore, it is equipped with an automatic cleaning asset that removes contamination from the model's lenses, mask stage and substrates. Overall, CANON PLA-501 is a highly precise, high-throughput mask aligner that is suitable for advanced micro-electronics research and for photolithography applications. It comes with an intuitive graphical user interface, advanced exposure control equipment, intelligent self-maintenance and automated cleaning system, making it an ideal choice for high speed and highly accurate fabrication.