Used CANON PLA 501 #293760365 for sale

Manufacturer
CANON
Model
PLA 501
ID: 293760365
Wafer Size: 6"
Mask aligners, 6".
CANON PLA 501 is a state-of-the-art mask aligner designed for the most precise and accurate transfer of photoresist patterns on substrates. It utilizes a highly efficient alignment system that is compatible with various types of masks and substrates. CANON PLA-501 consists of three major components: the alignment/exposure head, a control unit, and a movie camera for alignment measurement. The high-precision alignment head consists of increased magnification optical parts that are air-cooled and electrically cooled to provide even and detailed alignment. The head is connected to a 10-bit microcomputer control unit that enables users to select the desired mask alignment and exposure time. The advanced movie camera can measure up to 256 x 256 alignment points within a single measurement with a precision of 0.2 µm. PLA 501 is designed for high-precision repetitive exposure of photosensitive material. It has a wide range of exposure variables, including light intensity, focus, exposure time, shot area and wavelength range. The machine comes with an advanced logic operation system that provides powerful modeling capabilities to ensure perfect alignment and repeatability of operation. PLA-501 is equipped with multiple function options such as automatic centralization, symmetry, and bias shift compensation, making it well-suited to the requirements of high-precision lithography. CANON PLA 501 has a user-friendly control interface which allows users to quickly set up and operate the machine, minimizing errors and maximizing efficiency. This mask aligner also comes with a highly reliable automatic thermal-exposed and chemical-exposed system, which ensures resilient operation with minimal maintenance requirements. CANON PLA-501 uses state-of-the-art technologies to provide superior performance in terms of printing accuracy, precision, and speed. Finally, the machine is compatible with various substrates and substrate sizes.
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