Used CANON PLA 501 #9194809 for sale

Manufacturer
CANON
Model
PLA 501
ID: 9194809
Mask aligner.
CANON PLA 501 is a mask aligner used for the production of semiconductor devices and circuit boards. It is a fully automated system designed to improve yields while meeting the rigorous demands of today's device fabrication processes. CANON PLA-501 is an advanced mask aligner that utilizes computer-controlled optics for alignment accuracy. It has a field of view of up to 285mm, allowing a larger range of wafer sizes to be aligned accurately. The alignment accuracy can be as low as 10μm, been beneficial for high density and precision semiconductor device production. In addition, it is effective in the reduction of mis-aligned chips and scratches on the wafer. PLA 501 is equipped with a dual-finishing system, offering increased process flexibility. This allows it to process both single layer and double layer patterned wafers, which can be used for device fabrication. It also has advanced overlays of up to 45nm, increasing the predictability of chip performance. PLA-501 also features cost-saving process automation with a fully automated Wafer Fork Pick-up System. Automating the pick-up process will reduce erroneous alignment on the wafer caused by contamination. Therefore, reducing human errors significantly. It has a high throughput speed of up to 150 wafers per hour, freeing up resources and reducing processing time. In addition, integrated pressure sensors in the mask table improve the accuracy of the pressure control needed for image transfer. The machine is designed for ease of use and maintenance with numerous user interfaces available for controlling all mask aligner settings. It can be used in combination with CANON CLEAN EXCELL Cleaning Apparatus to reduce cleaning time in memory fabrication. Overall, CANON PLA 501 is an advanced machine that offers precision alignment accuracy and cost-effective process automation. It provides higher yields while ensuring the highest quality of device patterning in semiconductor fabrication.
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