Used CANON PLA 600 FA #154145 for sale

Manufacturer
CANON
Model
PLA 600 FA
ID: 154145
Wafer Size: 6"
Mask aligner, 6".
CANON PLA 600 FA is an advanced automated mask aligner designed for precise lithography applications. It is suitable for performing a wide range of applications, including semiconductor device fabrication, nanotechnology, and microelectromechanical systems (MEMS). CANON PLA-600FA is equipped with an automated 3D alignment equipment and several laser sources, allowing it to achieve precise and accurate alignment of multiple layers. PLA 600FA's three-dimensional (3D) alignment system allows for precise placement of the mask, making it a reliable tool for precise lithographic operations on various materials. The 3D alignment ensures that both the pattern and the substrate can be accurately aligned. The unit also reduces the chances of misalignment and provides an improved alignment accuracy of 5 μm. CANON PLA 600FA is equipped with a wide range of laser sources that are highly useful for performing patterning operations on a variety of materials. These laser sources include an excimer laser, a near-infrared diode laser, and an ultrashort pulse laser. The excimer laser is primarily used for processing materials that cannot be exposed to visible light, such as the SiO2 layer of a semiconductor device. The near-infrared diode laser is a powerful tool for laser trimming, patterning and etching operations, while the ultrashort pulse laser is great for fine-patterning operations. The machine also offers a variety of lithographic processes that can be used for a variety of applications, including contact lithography and proximity lithography. The contact lithography process is ideal for creating small patterns, such as those used in MEMS, while the proximity lithography process is ideal for large-scale lithography operations. Furthermore, PLA 600 FA is capable of controlling the exposure dose and has a minimum line width of 5 um. Finally, PLA-600FA is easy to use and operate, making it suitable for both small-scale and large-scale lithography applications. The tool also comes with all the necessary components to enable smooth operation, such as a chamber, stepping motor, and software, which can be easily operated by the user. In addition, the asset is supplied with a remote controller, allowing users to control the model's parameters remotely.
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