Used CANON PLA 600 #293660393 for sale
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ID: 293660393
Wafer Size: 6"
Mask aligner, 6"
Non-SMIF type
Main body
Control rack
Mercury lamp power supply
Parts box
Alarm unit.
CANON PLA 600 is a mask aligner specifically designed for optical proximity correction of photomask patterns for the semiconductor industry. It is a fully automated, high-precision tool that allows for fast and accurate mask alignment with a level of repeatability unmatched by any traditional lithography equipment. PLA 600 uses a linear movement drive system that provides high-resolution control and accuracy for mask alignment. Its alignment accuracy is 0.12 µm (6sigma) for XY mode and 0.20 µm (6sigma) for angular mode. This ensures that the patterns formed on the photomask precisely match the patterns on the reticle to achieve the desired optical proximity correction. CANON PLA 600 also comes with a powerful software package that provides full automation of the mask alignment process and advanced features for precise control of the process. The software supports a variety of patterns and can be used to optimize process parameters such as exposure time, focus position, etc. for optimal mask alignment. PLA 600 is also equipped with a high-precision and automated positioning system that allows it to precisely align reticles in a fraction of the time it takes for manual alignment. This ensures that the photomask patterns are accurately aligned with minimal human input. Finally, CANON PLA 600 has a long service life, making it an ideal option for long-term production runs. The tool is designed to meet the tight tolerances and standards of modern semiconductor production processes, and it is designed to run for up to 10 years of continuous use without issue. This makes it a reliable and cost-effective choice for semiconductor mask alignment.
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