Used ELS TECHNOLOGY ELS 104SA #9161432 for sale

ELS TECHNOLOGY ELS 104SA is an advanced mask aligner used for the fabrication of hard x-ray and soft X-ray optics. ELS 104SA utilizes alignment marks formed on the front surface of the mask and exposed in imaging optics to accurately register the mask position with the optics. Specifically, ELS TECHNOLOGY ELS 104SA makes use of laser interferometry and electronic image analysis to align a mask over a substrate plate within a few nanometers. ELS 104SA is comprised of several key components, including a mask spinner, scan head, beam splitter, auto stage, and auto detector. The mask spinner is a rotary motor used to precisely align the mask to the substrate plate. Through the control software, the program selects the plate spin rate which allows for accurate XY alignment. Additionally, it features a manual raster, which increases the accuracy of the alignment by allowing users to manually adjust the overlap between the mask and the substrate. ELS TECHNOLOGY ELS 104SA's scan head allows users to select the pattern size, resolution, and scanning direction, and contains an ultra-stable quartz plane mirror that can hold 0.02 micron accuracy and 10 nanometer resolution. The beam splitter is a prism that separates incoming light into two separate beams, one beam provides smaller scan field size, reduces aberration at the edge of the mask or substrate, and increases throughput. High precision and stability is maintained with ELS 104SA's auto stage which ensures alignment accuracy and repeatability. It also includes vernier scales for precise XY stage motion. The auto detector enables automatic recognition of the alignment marks, providing high accuracy and repeatability. It works in conjunction with the auto stage to increase accuracy and minimize the cost of manual alignment. Overall, ELS TECHNOLOGY ELS 104SA is an ideal choice for users seeking a mask aligner that can handle both hard x-ray and soft x-ray optics. With its highly accurate and repeatable alignment capabilities, ELS 104SA continues to be a reliable and affordable choice for a number of applications in the medical and industrial fields.