Used ELS TECHNOLOGY ELS 106SA #293768116 for sale

ELS TECHNOLOGY ELS 106SA mask aligner is a versatile, accurate, and reliable lithography tool used in semiconductor device fabrication. The equipment is designed for high-resolution electron beam, x-ray and optical lithography applications and provides nanometer-scale accuracy. This system includes a mask aligner, chamber, substrate chuck, and accessories. The mask aligner uses a motorized stage to precisely move and align masks for resolution as small as 500nm. This helps ensure that the device being fabricated is precise and atomically aligned. The chamber of ELS 106SA is a single-zone, one-piece, submicron-clean-class unit of on-axis design. This design enables rapid substrate chuck insertion and removal, and the chamber has a unique porting machine that allows easy integration of multiple accessories. It also has a high-temperature heating source to provide thermal compensations for precise alignment. The substrate chuck of ELS TECHNOLOGY ELS 106SA is designed to enable low-angle substrates, with pre-aligned alignment markers capable of achieving resolutions as small as 5nm. The optional accessories include an electron beam evaporator, a gas-infusion deposition source, an optical focusing tool and a quartz crystal monitoring asset. The model also includes a safety interlock feature to ensure operator safety. ELS 106SA is designed for both research and industrial applications and offers user-friendly, intuitive control for versatile fabrication tasks. It features an advanced graphical user interface for configuring multiple parameters and for monitoring equipment performance. The system also includes analysis and logging capabilities, allowing clients to easily track pattern changes and detect any abnormalities. In addition, this unit boasts an integrated maintenance machine for periodic inspection and testing to maintain optimal tool performance. This asset is robust, reliable, and designed to withstand environmental and operational stress. Overall, ELS TECHNOLOGY ELS 106SA mask aligner is a precise, user-friendly, and reliable model that is designed for high-resolution lithography applications. Its advanced features, robust design, and intuitive control equipment make it an ideal tool for semiconductor device fabrication.