Used EVG / EV GROUP 620 #9157850 for sale

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Manufacturer
EVG / EV GROUP
Model
620
ID: 9157850
Wafer Size: 6''
Mask aligner, 6" BSA Lamphouse: 500W Automatic filter exchanger Spare parts included Currently de-installed.
EVG / EV GROUP 620 is an advanced Mask Aligner equipment that is designed for versatilemask processing and testing needs. It incorporates a fully automated optical alignment technology that enables precise and repeatable registration of flat substrates against rigid or flexible masks. This system also provides superior throughput and accuracy for a wide range of applications. EVG 620 features world-class optical components, software, and systems engineering. Its state-of-the-art alignment unit, including two 13 axes of precision drives, can achieve a high degree of accuracy while providing precise control of the substrate during active alignment processes. This makes it ideal for applications such as resist imaging, fine line lithography, precision substrate preparation, and other challenging tasks. The automated alignment process, which uses a combination of a high precision optical imaging sensor and a steerable mask, ensures accurate placement of the substrate every time, with repeatability of better than +/- 1 micron both in the X and Y axes and better than +/- 2 microns in the Z axes. This enables highly accurate resist images and precise substrate preparation. The machine also features a powerful lithography tool to ensure sub-micron accuracy for all operations. The asset's automated Z-focus module enables a dynamic scan to ensure uniformity in resist thickness. Cascading operation modes ensure ultra-high resolution and deviation control, while its advanced alignment and detection algorithms allow for fast, accurate matching of design data, minimizing outliers. The model is also extremely user friendly, featuring a high-resolution, color LCD 4.3" touch screen that displays information such as alignments, number of exposures, total amount of exposure per substrate, as well as detailed evaluation of resist results. This enables easy and intuitive operation. EV GROUP 620 is a highly advanced Mask Aligner equipment with excellent performance capabilities and user-friendly operation. It has the ability to deliver superior speed and accuracy for a wide variety of applications, while making detailed evaluations of resist results available through its high-resolution, color LCD 4.3" touch screen.
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