Used EVG / EV GROUP 620 #9276216 for sale

EVG / EV GROUP 620 is a mask aligner equipment designed for photolithography applications. It is used in the process of creating and printing microelectronic components, such as integrated circuits. The system is capable of printing with feature sizes as small as 10nm. The unit consists of two main components; the Aligner and the Mask Processor. The Aligner has a large X-Y motorized stage and a projector to project patterns onto photoresist-coated substrates such as silicon wafers. The Mask Processor includes a rotatable 6-axis robot arm, a gas delivery machine, a process gas monitor, and a mask storage and loading tool to hold up to 25 different masks and 5 substrates. The asset's alignment accuracy is high, with an average alignment error of 1.2um or less, and an optical filter model to ensure uniform exposure. The Aligner is also equipped with a built-in vacuum equipment for added precision during mask alignment, which also helps reduce air susceptibility. The system is designed to be user friendly, with control software that allows users to easily design, modify, or create masks to enable precise printing of patterns on both sides of the substrate. It also includes a vacuum unit that allows for more efficient cleaning and baking of the substrate. EVG 620 has a wide range of applications, from basic pattern printing to 3D printing of micro components, as well as thermal and electron beam lithography for advanced circuit fabrication. Its high accuracy, flexibility, and user-friendly control software mean it is suitable for research and educational projects, as well as industrial level prototyping. Its structure also allows for easy integration with other equipment, such as vacuum containers for better process control.