Used EVG / EV GROUP 6200 #9223335 for sale
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ID: 9223335
Wafer Size: 8"
Vintage: 2006
Mask aligners, 8"
Manual wafer load mask aligner (TSA+BIR)
With mask holder: 9”x 9”
Exposure mode: Soft contact / Hard contact / Vacuum contact
Lamp house: 1000 W
Range of alignment: X, Y: +/- 5 mm
Rotation: Theta +/- 3.5°
Actuated by analog 3 axes joystick
Resolution: 0.06 μm
Movements: Motorized
Alignment accuracy:
Top side alignment: 0.5 μm (With 20x objective)
Top to bottom side alignment: 1 μm (With 20x objective)
2110C2-E Radiation power system
Anti vibration table: 1000 W
User interface: Microsoft Windows based
Monitor screen
System PC
Keyboard
Cables
Joysticks
UPS
Operations manual
2006 vintage.
EVG / EV GROUP 6200 mask aligner is a highly advanced tool for photolithography and thin-film alignment processes used in the fabrication of MEMS, semiconductor and flat panel display devices. This equipment is designed to enable precision shifts in x, y and z axes to achieve the best alignment of the mask (or stencil) and substrate layers. EVG 6200 mask aligner features an in-plane and out-of-plane alignment capabilities with a positioning accuracy of 0.5µm per axis. In addition, it features a high resolution camera system with alignment point and nodal recognition for exact placement. It is also compatible with standard off-the-shelf optics and vacuum chucks up to 110mm in diameter. The ergonomically-designed integrated workstation includes unit-on-chip processing, high-speed asynchronous control and advanced user interfaces. All components are integrated in an integrated industrial-grade aluminum housing and sit atop vibration-free air-mounts for unparalleled stability. This machine is designed with an auto-calibration feature which simplifies operation and ensures repetition accuracy and product uniformity. Additionally, it includes auto exposure capability that enables variable exposure adjustments and profiles. For maximum productivity, it incorporates high-performance manual indexing table and operation status notifications to ensure efficient device processing. Through its intuitive graphical user interface, EV GROUP 6200 mask aligner can be easily configured to match customers' specific application requirements. 6200 mask aligner enables precise alignment of the substrate with the pattern, reducing line width and feature misalignment. Its highly accurate position and rotation feedback machine guarantees minimum alignment errors to give the desired prints. The tool is compatible with various thermoplastics, low-thermal-conductivity materials, and metals for printing pads and vias with high accuracy. Furthermore, this tool is highly energy-efficient, helping to reduce energy bills and preserving environmental quality.
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