Used EVG / EV GROUP 620NT #9286955 for sale
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ID: 9286955
Wafer Size: 6"
Vintage: 2017
Mask aligner, 6"
Top side and backside alignment
Halogen light source
2017 vintage.
EVG / EV GROUP 620NT Mask Aligner from EVG is a next-generation precision photolithography equipment. It is a versatile tool for high resolution patterning across a wide range of applications, from MEMS/sensors to microfluidics and optoelectronics. EVG 620NT is well suited for advanced, ultra-fine fabrication technology, offering superior alignment accuracy and precision post-exposure registration. EV GROUP 620NT is also flexible enough to adapt instantly to challenging structures and substrates. 620NT offers a field-optimized 5.2 micron spot size and up to 30 mJ/cm2 UV exposure sources, providing precise alignment and patterning. The system's exposure heads can be switched out depending on the source, and there is also a 64-bit exposure cha speed control for fine-tuning your exposure protocol. The substrate stage has a non-contact servo control unit which can achieve sub-micron positional accuracy with a high resolution encoder for position readings. It also features environmental controls and an active workspace imaging machine for increased safety. The alignment of EVG / EV GROUP 620NT is highly accurate and repeatable, due to its advanced wafer-to-mask zoom technology. The tool has advanced alignment mark identification, which ensures the precise registration of patterns across a range of different substrate materials. It also features a complete library of analytical tools for alignment validation and process validation, as well as a proprietary preset optimization engine. Finally, the asset includes a comprehensive data analysis and measurement package, allowing for detailed process monitoring and assessment. Utilizing the latest in advanced photolithography technology, EVG 620NT Mask Aligner offers high resolution, accuracy, and reliability for a range of complex fabrication applications. If you need patterning uniformity across different substrates, then EV GROUP 620NT is the tool for you. It is user-friendly, with intuitive touchscreen controls and user-selectable parameters for ultimate flexibility. You can trust 620NT to provide reliable, repeatable, and precise patterns every time.
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