Used EVG / EV GROUP 640 #293744915 for sale
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ID: 293744915
Wafer Size: 8"
Vintage: 2002
Mask aligner, 8"
Chuck
Mask holder
UV LED Light source
UV LED Matching chiller
Area light intensity uniformity: < 2.5%
365 nm 45 mW/cm2
405 nm 55 mW/cm2
Front and back alignment system: 5x Lens
Automatic transmission non-functional
Manual loaded and unloaded
2002 vintage.
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