Used EVG / EV GROUP 640 #9200554 for sale

EVG / EV GROUP 640 is a fully-automated, multi-chamber mask aligner. It is used in the fabrication of precision optics, microelectronics, and semiconductor devices. This aligner is a precision tool for pattern placement and overlay that achieve minimal distortion and precise alignment accuracy. It is capable of achieving 9 micrometer placement accuracy and 10 nm overlay accuracy. This advanced mask aligner features a variety of core components, including a 6-in-diameter projection lens, a robotic X-Y-Z stage with 25 nm resolution, and three high-resolution digital cameras. The unit can handle up to three masks per run, and has two exposure modes, single- and multi-shot, allowing for fast and accurate exposure of all layers. The machine's stigmas transfer feature allows for optimization of alignment accuracy by actively compensating for inter-level offsets. It provides six-zone alignment for both one- and two-shots exposures. The unit also includes a variety of other integrated features, including electrostatic chuck planarity and monitoring, fast mask exchange using zero-line-move feature, a variety of automated wafer and mask handling capabilities, and low particle deposition. It is also capable of exposure of multilayer duplex spacer alignment substrates and up to four alignment fiducials per job. EV GROUPEVG 640 is a powerful and accurate tool for pattern placement and overlay. It offers an efficient process for producing precision optics, electronics, and semiconductor devices. With its robust features, it is a reliable solution for high-precision microfabrication needs.