Used EVG / EV GROUP EV 640 #9287503 for sale

EVG (EV GROUP) EVG / EV GROUP EV 640 is a highly advanced mask aligner designed for use in the semiconductor industry. This equipment is ideal for photomask alignment, wafer settlement, processing parameters setting, and alignment accuracy. It features high-precision XYΩ positioning systems with repeatability of +/-7.5 μm and nonlinearity of +/-10 μm. The stage is driven by linear drives with a maximum speed of 0.18 m/min. It achieves high accuracy of position repeatability and stability, as well as low thermal drift. EVG EV 640 is equipped with a high-resolution wafer alignment system and an integrated laser metrology unit. The wafer alignment machine provides highly accurate alignment with an offset error of 30 nm and accuracy of up to 10 nm with an integrated laser beam. The laser metrology tool's automated scan pattern and power optimizer ensure high throughput and accuracy. In addition, EV GROUP EV 640 features ST Marks, optimized digital cameras, and patented M2M (mask-to-mask) technology for precise alignment. EV 640 is designed for high-precision photomask alignment and is equipped with a vacuum gate and software-controlled degree of evacuation. With its optical measurement camera and ST Marks, it ensures accurate and repeatable registration of mask features. The high-accuracy stepper motors ensure accurate alignment of the masks, and the integrated TDC-5 motor controller provides precise control of the motor operation. EVG / EV GROUP EV 640 is suitable for back-end lithography applications, such as MEMS and through-hole lithography. The asset includes a wide range of software features, such as automated wafer loading and unloading, smart wafer mapping, and alignment tracking, to ensure fast and accurate alignment. It is also compatible with fully automated batch processing and tracking for high-volume production. Overall, EVG EV 640 mask aligner is a powerful and precise platform designed for advanced lithography applications. Its high accuracy and repeatability make it the ideal choice for the most demanding production environments. With its integrated systems and powerful software, EV GROUP EV 640 is an essential tool for any semiconductor lab or production facility.