Used HTG System 1 Model 84-3 #156406 for sale

HTG Equipment 1 Model 84-3 is a high precision mask aligner designed to accurately align and expose semiconductor mask patterns onto die chips. It is capable of imaging up to 5-inch wafers with a 5.5-inch image field and 100 micron resolution. It is equipped with a single-axis motorized X/Y stage and multiple alignment sensors which ensure precise and repeatable alignment of mask patterns onto die chips. The system includes a fixed high intensity UV source with an associated adjustable shutter-control unit that can be operated via the user-friendly micron controller. The UV source enables the exposure of device patterns and the shutter-control machine allows for precise control of pattern exposure time. The autoloader allows for the automatic loading and unloading of wafers without the need of manual operation. The machine's optics feature a quartz projection lens with a construction that is designed to minimize aberration and distortion. An adjustable iris allows for the correct illumination of device patterns during the masked exposure process. Furthermore, the optics also include two sensors - a reticle encoder and a die-chip encoder - that enable the precise and repeatable placement of die-chips and masks onto wafers. The machine is equipped with a range of environmental protection features. Such features include a nitrogen purge tool, multiple filter fans, and a wafer alignment control asset to ensure that wafer and mask alignments are constantly maintained. Overall Model 1 Model 84-3 is a powerful and reliable device for accurate and precise exposure of semiconductor device patterns onto die chips. Its user-friendly and intuitive user interface, combined with diverse set of features, delivers a high performance mask aligner.