Used KARL SUSS / MICROTEC BA 6 #9144075 for sale

KARL SUSS / MICROTEC BA 6 is a state-of-the-art mask aligner designed to meet the needs of mainstream semiconductor processing. This aligner utilizes advanced optical alignment and metrology features for precision wafer transfer and precise registration of both facets of the mask to the wafer. With a unique and revolutionary design, the equipment is user-friendly and provides extremely accurate mask alignment. MICROTEC BA 6 enables lithography at high resolutions, which limits impairment of the alignment accuracy. This corresponds to feature sizes down to 0.4µm and alignment accuracy of up to 1µm line width. The aligner includes a unique mechanism to align each alignment facet separately in the XY direction, which increases the accuracy of the aligner. KARL SUSS BA 6 integrates an advanced metrology mode, which allows for precise traceability of each exposure parameter. This system has the capability to measure alignment facets, mask to wafer distances, and critical dimensions with high precision. The aligner also features a highly precise stage motion control unit, allowing for repeatable alignment and exposure of features. This mask aligner incorporates a patented inspection machine, which checks the mask pattern and identifies alignment faults. Additionally, the database connection with the tool enables the asset to optimize alignment conditions through the use of statistical data. This increases the lifetime of the reticle by reducing the number of poor exposures. With its advanced features and capabilities, BA 6 provides some of the most precise mask aligning on the market. Its user-friendly interface and ease of use streamline the production process for semiconductor manufacturing.